Product Introduction
The ultrasonic scanning microscope USAM-30 is used for internal defect detection of materials science, semiconductor industry, and other related products. Using an ultra-high-speed linear motor motion system to drive a high-frequency ultrasonic transducer, conducting water immersion C-scan inspections.
Full-wave array collection of ultrasonic signals is used to effectively identify internal defects in products through imaging algorithms and data image processing capabilities, resulting in clear internal images. It also statistically analyzes the location, shape, and size of defects, generating customized reports.
Mechanical Part
- The XY axis uses a linear servo power system with a built-in magnetic levitation mechanism;
- It adopts a ironless core structure to ensure speed stability during operation;
- The Z axis stroke is greater than 100 mm, and the Z axis can automatically focus.
- Scanning range: 300mm x 300mm (can be expanded according to requirements);
- Maximum scanning speed: 1500 mm/s, repetition accuracy ±0.1 µm;
- Standard tank size: 600mm x 700mm x 170mmH (tank size can be customized);
Ultrasonic part
- DPR300 manual/automatic integrated, receiver bandwidth 60MHz.
- Maximum excitation voltage: 475V.
- 6 sets of high pass/low pass filters, 16 damping settings, adjustable pulse energy and impedance.
- Pulse repetition frequency 5KHz.
- 80db receive gain range.
- A/D sampling frequency: 1GHz (2G/3G option).
Software interface
Software Functions
- Interface tracking to eliminate the curvature of the product itself and the error of product shaking during the inspection process.
- Multiple feature imaging modes (amplitude imaging, time imaging, phase imaging, FFT imaging, slice imaging, multi-gate joint imaging, etc.).
- Area rescanning and precise positioning of defects, 1:1 accurate reproduction of the shape of the inspected workpiece and the size of defects.
- Inspection product database management, clear results, one-click report generation.
- Scanning axis and stepping axis can be switched at will, and the scanning interval can be adjusted infinitely (0.0 1 ~ 1 mm).
- With image zoom in and zoom out function, can clearly show the defect edge state, convenient for defect size measurement, statistics, and analysis.
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